Once you acquire the spectra, it is time to identify your edge of interest.
Common indicators you may use to identify your edge include:
Edge threshold energy (e.g., point of steepest rise)
Edge shape (e.g., hydrogenic, delayed, white lines)
Accompanying edges (e.g., Si L-edge at 99 eV, Si K-edge at 1839 eV)
Edge identification can be done in three different ways in DigitalMicrograph® 3 software.
When you select the AutoID button, it will show candidate edges on the spectrum. You will need to verify these edges using the common identifiers defined above. To aid in this task, the Mark Edges button can be used to show edge families. Once verified, you can then add them to the quantification list by pressing the → button to the left of the list.
By right-clicking on the spectrum itself, you will see the Edge ID menu where candidate edges are shown. The most probable edge will be in bold. You can add that edge to the quantification by using the Add to Quant menu choice.
Click the Open Periodic Table icon on the Elemental Analysis window to reach this option. This will, in turn, open a periodic table where you can directly select known elements to automatically add them to the quantification.
Delayed edge features, plural scattering, and overlapped edges can sometimes make edge identification difficult. Compare the acquired spectra to reference data (e.g., from the EELS Atlas) if you suspect overlapped edges or see unusual edge shapes. If the element has multiple edges available, confirm the existence of these features in your experimental data for unambiguous identification.
Ahn, C. C.; Krivanek, O. L.; Disko. M. M. EELS atlas: a reference collection of electron energy loss spectra covering all stable elements. HREM Facility, Center for Solid State Science, Arizona State University; 1983.