Excimer laser assisted re-oxidation of BaTiO3 thin films on Ni metal foils

Excimer laser assisted re-oxidation for reduced, crystallized BaTiO3thin films on Ni-foils was investigated. It was found that the BaTiO3 can be re-oxidized at an oxygen partial pressure of ∼50 mTorr and substrate temperature of 350 °C without forming a NiOx interface layer between the film and base metal foil. Thedielectric permittivity of re-oxidized films was >1000 with loss tangent values