Minor edges
L112100
L211544
M12820
M22575
M32281
N1595
N2492
N3425
N4259
N5245
N637
N734
O177
Considerations
The M4,5-edge overlaps with Si K-edge and the M-edges of Hf and Ta. Use MLLS fitting or model based EELS to separate these edges.
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