Chemical and compositional analysis of 3D NAND and FinFET devices

Learn how the complementary nature of electron energy loss spectroscopy (EELS) and energy dispersive spectroscopy (EDS) signals makes it highly desirable to acquire both during transmission electron microscope (TEM) investigations of materials. With ongoing improvements in electron instrumentation and detectors, it is now practical to acquire joint EELS-EDS spectrum image data for materials analysis all the way from large area mapping down to atomic scale analysis.