Atomic elemental and chemical analysis of SrTiO3/LaMnO3 multilayers using fast simultaneous EELS and EDS analysis in DigitalMicrograph

In an age of atomic-scale control of materials and interfaces, the need for high spatial resolution characterization and local bonding is accelerating. Scanning transmission electron microscopy (STEM) based techniques continue to be the gold standard for such analysis at interfaces, and aberration correction of the STEM probe has extended this ability to atomic levels [1, 2]. The utility of this technique, however, is limited by the ability to detect the signals generated in the STEM.