Development of a monochromator for aberration-corrected scanning transmission electron microscopy

In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 meV at 60 kV.

Published in


Authored by

Mukai, M.; Okunishi, E.; Ashino, M.; Omoto, K.; Fukuda, T.; Ikeda, A.; Somehara, K.; Kaneyama, T.; Saitoh, T.; Hirayama, T.; Ikuhara, Y.

Publication date

Thursday, February 5, 2015
Resource category
Technique category