Measuring the thickness of aluminium alloy thin foils using electron energy loss spectroscopy

Combining electron energy loss spectroscopy and convergent beam electron diffraction measurements, we have determined the mean-free-path for inelastic electron scattering for four different aluminium alloys. Electron energy loss spectroscopy spectra were acquired with the transmission electron microscope in image mode, without any objective aperture inserted. The value for pure aluminium was determined as 119 ± 5nm at an incident electron energy of 150keV.