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Fast Joint EELS / EDS color map of a SrTiO3 crystal

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Dr. Yan Xin at Florida State University, Tallahassee, FL Microscope courtesy of Professor Gerald Kothleitner, TU-Graz, Austria Acknowledgement to Dr. Arno Meingast at CCEM, TU-Graz, Austria for helping set up microscope for experiment.

Methods
Fast joint EELS / EDS color map across a 32 nm transistor device

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Dr. Pavel Potapov at Global Foundries, Dresden, Germany Microscope courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA Acknowledgements to Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA for helping set up microscope for experiment.

Methods
Fast joint EELS / EDS color map across the SrTiO3/LaFeO3 interfaces

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA Microscope courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA Acknowledgements to Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA for helping set up microscope for experiment.

Methods
Fast joint EELS/EDS color map across SrTiO3/LaFeO3/LaCuOx interfaces

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of by Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose CA Microscope courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose CA Acknowledgements to Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA for helping set up microscope for experiment.

Methods
Ultrafast giant atomic EELS color map across the SrTiO3/LaMnO4 interfaces

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA Microscope courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA Acknowledgement to Dr. P. Rice and Dr. T. Topuria at IBM (Almaden) for helping set up microscope for experiment.

Legend

Green: Ti L at 456 eV; red: Sr L at 1940 eV; purple: La M at 832 eV; blue: Mn L at 640 eV

Methods
Fast DualEELS color map across the InP/HfO2 interface

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Paolo Longo PhD, Gatan, Inc. Sample courtesy of Professor Robert Wallace at UTD, Richardson, TX Microscope courtesy of Professor Ray Carpenter, Arizona State University, Tempe AZ Acknowledgement to Dr. Toshiro Aoki at Jeol USA (now at ASU) for helping set up microscope for experiment.

InP substrate is very beam sensitive; EELS analysis was carried out at high-speed to avoid electron beam-induced damage.

Methods

Probe-corrected Jeol ARM 200 TEM/STEM microscope; S-FEG emission gun; Enfinium™ ER system; voltage: 200 kV; STEM mode
Fast atomic DualEELS color map across the SrTiO3/SrMnO4 interface

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Professor David J. Smith at Arizona State University, Tempe, AZ Microscope courtesy of Professor Ray Carpenter at Arizona State University, Tempe, AZ Acknowledgement to Dr. Toshiro Aoki at Jeol USA (now at ASU) for helping set up microscope for experiment.

Legend

Red: Ti L at 456 eV; green: Sr L at 1940 eV; yellow: La M at 832 eV; blue: Mn L at 640 eV

Methods
Fast DualEELS color map of a III-V transistor device structure before gate metallization process

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of University of Glasgow Microscopecourtesy of Professor Gerald Kothleitner, TU-Graz, Austria

Methods
Atomic Resolved EELS color map of GaAs/Ga2O3

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of University of Glasgow Microscope courtesy of Dr. Yan Xin at Florida State University, Tallahassee, FL Acknowledgement to Dr. Toshiro Aoki at Jeol USA (now at ASU) for helping set up microscope for experiment.

Dumbbell structure of GaAs on left hand side of color map is clearly resolved, and Ga and As atomic columns are visible. Interface region shows presence of Ga2O monolayer responsible for keeping Fermi level unpinned, which allows the electronic device to be turned on or off.
Atomic level EELS color map of a Pt/Ru catalyst nanoparticle

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Paolo Longo, Ph.D., Gatan, Inc. Sample courtesy of Professor Gianluigi Botton at CCEM, Hamilton, ON, Canada Microscope courtesy of CCEM, Hamilton ON, Canada Acknowledgement to Dr. Andreas Korinek at CCEM for helping set up microscope for experiment.

Methods