Publication
Krivanek, O. L.; Dellby, N.; Murfitt, M. F.; Chisholm, M. F.; Pennycook, T. J.; Suenaga, K.; Nicolosi, V.
Aberration correction of the scanning transmission electron microscope (STEM) has made it possible to reach probe sizes close to 1 Å at 60 keV, an operating energy that avoids direct knock-on damage in materials consisting of light atoms such as B, C, N and O.