Similar to spectroscopy, EFTEM is a simple workflow for enhancing contrast, mapping, and analyzing chemicals or elements.
- Find the region of interest you want to map.
- Insert and center an appropriate objective aperture.
- Align the zero-loss peak.
- Focus and stigmate the image.
- Take a thickness map to decide if the sample has the correct thickness to proceed.
- Move to an energy offset appropriate for the type of map you want to acquire.
- Focus and stigmate at the energy loss.
- Acquire maps.
- Adjust manual settings if needed.
Follow these step-by-step instructions for the above workflow when you use DigitalMicrograph® software.
