Once you acquire a spectrum or a collection of spectra, you need to extract information from that data. Here we will discuss how to identify which elements are present, as well as best practices to extract and quantify elemental specific information to determine sample composition. 

Fundamental aim of EELS quantification

A typical analysis follows these steps:

Proceed to the next page for step-by-step instructions for using Gatan Microscopy Suite® (GMS) 3 software to quantify your data.