STEM SI Workflow
In STEM, the electron beam is focused into a small probe and rastered to acquire spatial information in a serial manner (X, Y). In this acquisition mode, spectrum imaging (SI) is performed when you acquire a parallel spectrum at each pixel position, hence building up the spectrum image on a spectrum-by-spectrum basis (STEM SI). A typical workflow includes:
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Set up the microscope in scanning mode and in the appropriate state for the spectrometer you wish to use.
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Use the DigiScan™ system to acquire and assign a Survey Image.
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Create a spectrum image survey region of interest on the Survey Image.
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View the spectra from the region where you wish to acquire the spectrum image.
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In the SI Setup dialog, specify which spectrum signals you want to acquire.
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If artifact corrections are required, enable them and/or create the artifact correction survey regions of interest.
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In the Spectrum Image dialog, specify the pixel dwell time you want to use and the size of the spectrum image in pixels.
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Select Start on the Spectrum Imaging dialog.
Here are detailed STEM spectrum imaging workflows you can follow to better understand your sample when you use DigitalMicrograph® software.